Material Science

Field Emission Scanning Electron Microscope

Model: JSM-7600F Schottky Field Emission Scanning Electron Microscope

Make: Jeol company, Japan


  • Semi in-lens SEM with high resolution: The adoption of a High Power Optics irradiation system delivers high-resolution, high-speed, high-accuracy element analysis. The incorporation of the Gentle Beam enables top-surface imaging of a specimen at very low energies of several hundred eV. Semi-in-lens provides high-resolution observation and analysis. High resolution observation and high spatial resolution analysis is achieved through the combination of a semi-in-lens type objective lens that can collimate the electron beam even at low accelerating voltages, and the in-lens Schottky electron source that provides a stable current over a long service life.
  • Gentle Beam (GB) provides top-surface imaging with ultra-low energy incident electrons A Gentle Beam (GB mode) with better resolution than the normal mode is available. In GB mode a bias voltage is applied to the specimen while the electron beam is emitted, allowing top-surface imaging with only several hundred eV of incident electron, making it possible to obtain high resolution images of samples that have been difficult to observe until now.
  • High Power Optics delivers high-speed, high-precision analysis. High Power Optics are adopted for the optical system, providing not only high-resolution imaging, but also stably delivering high-speed, high-precision analysis, including element analysis.



SEI resolution

1.0nm(15kV), 1.5nm(1kV)


25 to 1,000,000
(on the image size 120mm 90mm)

Accelerating voltage

0.1kV to 30kV

Probe current

1pA to 200nA 

Aperture angle control lens



Upper detector, lower detector

Energy filter

New r-filter

Gentle Beam


Digital image

1,280 x 960 pixels, 2,560 x 1,920 pixels, 5,120 x 3,840 pixels

Specimen airlock chamber

One-action specimen exchange mechanism built-in

Specimen stage

Eucentric, 5 axes motor control










-5° to ~+70°

-5° to +70°

-5° to +70°






1.5mm to 25mm

1.5mm to 25mm

1.5mm to 25mm

Evacuation system


Eco design

During normal operation : 1.2kVA
During the sleepmode : 1kVA
During the evacuation system OFF : 0.76kVA


X-Ray Diffraction

Make: Panalytical

Model: X’Pert Pr


  • X-ray source: The Ceramic diffraction X- ray tube
  • Tube Anode material: Cu (Ka 1.5405 Å)
  • Working condition: 45 KV & 40 mA.
  • Incident beam optics: Soller slit (0.04 rad), Ni-filter, interchangeable divergence fixed slits and masks.
  • Diffracted beam optics: Soller slit (0.04 rad), interchangeable anti-scattering slit and Monochromator.
  • Detector: X Celerator detector.
  • Measurement range: 5º to 140º.
  • Sample stage: fixed stage and spinner  with Automatic multi-sample changer (45 samples)
  • Software: Data Collector, Data Viewer and HighScore pluse.
  • Database: PDF-2 release 2012 (ICDD) and ICSD databases.
  • Sample Holders: Sample holders are made of Aluminum, for powder samples.
  • Zero background sample holder is an obliquely cutted silicon crystal, which can be used to mount very small amount of powder.

Wavelength Dispersive X-ray Fluorescence Spectrometry (XRF)

Model: Axios mAX

Make: PAN Analytical


  • Sequential Wavelength Dispersive X-ray Fluorescence (WDXRF) technology with high efficiency and sensitivity coupled with Rhodium (Rh) target x-ray tube with an exciting voltage of 25 kV and operating current 160 mA.
  • Equipped with the latest version of SuperQ software which is simple, intuitive program for routine quality control analysis instrument can be used by anyone.
  • Analyze major and trace elements from sodium (Na11) to uranium (U92) in concentration ranges from ppm to high percentage (%).
  • A robust technique, combining high precision and accuracy with straightforward, fast sample preparation.
  • Provides qualitative, semi- quantitative to full quantitative information on a sample.
  • High-capacity sample changer bed (up to 68 positions) for readily automated use in high throughput applications.