Model: JSM-7600F Schottky Field Emission Scanning Electron Microscope
Make: Jeol company, Japan
Features:
Specifications:
SEI resolution
1.0nm(15kV), 1.5nm(1kV)
Magnification
25 to 1,000,000 (on the image size 120mm 90mm)
Accelerating voltage
0.1kV to 30kV
Probe current
1pA to 200nA
Aperture angle control lens
Built-in
Detectors
Upper detector, lower detector
Energy filter
New r-filter
Gentle Beam
Digital image
1,280 x 960 pixels, 2,560 x 1,920 pixels, 5,120 x 3,840 pixels
Specimen airlock chamber
One-action specimen exchange mechanism built-in
Specimen stage
Eucentric, 5 axes motor control
Type
IA
II
III
X-Y
70mm×50mm
110mm×80mm
140mm×80mm
Tilt
-5° to ~+70°
-5° to +70°
Rotation
360°
WD
1.5mm to 25mm
Evacuation system
Two SIPs, TMP, RP
Eco design
During normal operation : 1.2kVA During the sleepmode : 1kVA During the evacuation system OFF : 0.76kVA
Make: Panalytical
Model: X’Pert Pr
Model: Axios mAX
Make: PAN Analytical